Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma

Engineering & Materials Science

• Acetylene 17%
• Amorphous carbon 19%
• Atmospheric pressure 71%
• Carbon 19%
• Carbon films 100%
• Dilution 28%
• Electrodes 9%
• Electron microscopes 12%
• Fourier transform infrared spectroscopy 15%
• Gases 36%
• Microstructure 8%
• Oxygen 10%
• Plasma CVD 23%
• Plasmas 58%
• Polyethylene terephthalates 33%
• Polymers 9%
• Scanning 9%
• Substrates 9%
• Surface morphology 14%

Physics & Astronomy

• acetylene 11%
• atmospheres 7%
• atmospheric pressure 56%
• carbon 42%
• dilution 21%
• electrodes 6%
• electron microscopes 8%
• gases 32%
• infrared spectroscopy 9%
• luminescence 48%
• microstructure 6%
• oxygen 6%
• polyethylene terephthalate 24%
• polymers 6%
• scanning 6%
• vapor deposition 8%

Chemical Compounds

• Acetylene 9%
• Amorphous Material 7%
• Behavior as Electrode 5%
• Carbon Atom 30%
• Dilution 17%
• Dioxygen 5%
• Electron Particle 5%
• Fourier Transform Infrared Spectroscopy 5%
• Gas 33%
• Liquid Film 30%
• Microstructure 7%
• Plasma 39%
• Plasma Chemical Vapour Deposition 14%
• Pressure 37%
• Surface 6%
• Time 3%