Titanium alloys are widely used for the hard tissue substitute implants. However, it is necessary to improve interfacial biocompatibility for reduce adhesion period. For improvement of biocompatibility of titanium alloys, texture and chemical composition on contact part with biological tissue play very important roles. In this research, mist of glycerophosphoric acid calcium aqueous solution was applied on the laser irradiated area. As result, micro texture including Ca and P elements was generated on the Ti-6Al-4V-ELI alloys surfaces. When laser was irradiated, glycerophosphoric acid calcium aqueous solution applied as mist flowed on the test pieces as droplet. The velocity of droplet fluid was relatively fast, so that laser irradiation was unhindered access to the surface of specimens and the treatment was stable. In order to estimate biocompatibility of treated surfaces having micro texture with Ca and P element, culture assays using osteoblast cells were conducted. As result, it was clearly that biocompatibility of the specimen treated by laser with glycerophosphoric acid calcium aqueous solution mist more improved than treated specimen soaked in glycerophosphoric acid calcium aqueous solution.