Graphene for VLSI: FET and interconnect applications

Yuji Awano

    研究成果: Conference contribution

    27 被引用数 (Scopus)

    抄録

    Because of their remarkable physical properties, graphene should be one of the most important Emerging Research Materials (ERM) for not only the front-end but also back-end devices of VLSIs for the next decade. In this paper, we discuss the present status of their material technologies and some issues to be addressed for realizing graphene channels and wiring devices for a future LSI.

    本文言語English
    ホスト出版物のタイトル2009 International Electron Devices Meeting, IEDM 2009 - Technical Digest
    ページ10.1.1-10.1.4
    DOI
    出版ステータスPublished - 2009 12 1
    イベント2009 International Electron Devices Meeting, IEDM 2009 - Baltimore, MD, United States
    継続期間: 2009 12 72009 12 9

    出版物シリーズ

    名前Technical Digest - International Electron Devices Meeting, IEDM
    ISSN(印刷版)0163-1918

    Other

    Other2009 International Electron Devices Meeting, IEDM 2009
    CountryUnited States
    CityBaltimore, MD
    Period09/12/709/12/9

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering
    • Materials Chemistry

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