Growth and optical characterization of dense arrays of site-controlled quantum dots grown in inverted pyramids

S. Watanabe, E. Pelucchi, B. Dwir, M. Baier, K. Leifer, E. Kapon

研究成果: Conference article査読

5 被引用数 (Scopus)

抄録

We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on {1 1 1}B GaAs substrate pre-patterned using electron beam lithography and wet chemical etching. The growth conditions such as deoxidation and growth temperatures, growth rates, and V/III ratio, had to be chosen quite differently from those employed with micron-size pyramids. Low-temperature micro-photoluminescence and cathodoluminescence spectra of the samples show distinct luminescence from the QDs with a linewidth of less than 1 meV and uniform emission energy for an ensemble of 900 QDs. The possibility of incorporating such QD arrays inside optical microcavity structures is also discussed.

本文言語English
ページ(範囲)193-198
ページ数6
ジャーナルPhysica E: Low-Dimensional Systems and Nanostructures
21
2-4
DOI
出版ステータスPublished - 2004 3月
外部発表はい
イベントProceedings of the Eleventh International Conference on Modulation (MSS11) - Nara, Japan
継続期間: 2003 7月 142003 7月 18

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 凝縮系物理学

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