Ferrimagnetic Mn4N films have been prepared on glass substrate by reactive magnetron sputtering with in-situ prepared MnO seed layers. Mn4N film directly grown on glass substrate is used as a control group to compare. It has been found that the Mn4N film can grow heteroepitaxial on the MnO layer, the crystallinity and perpendicular magnetic anisotropy are significantly improved by the seed layer. The excellent magnetic properties and simple preparation methods will definitely boost the application potential of Mn4N film in spintronics devices.
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