抜粋
To synthesize hydrogenated amorphous carbon (a-C:H) films, filamentary dielectric discharge (FDBD) is used to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD), which is generally used for atmospheric pressure-plasma-enhanced chemical vapor deposition. The discharge form transitioned from GDBD to FDBD when the gap between the electrodes is increased from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard a-C:H films can be synthesized at room temperature by atmospheric pressure using FDBD.
| 元の言語 | English |
|---|---|
| 記事番号 | 1800084 |
| ジャーナル | Macromolecular Symposia |
| 巻 | 382 |
| 発行部数 | 1 |
| DOI | |
| 出版物ステータス | Published - 2018 12 1 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Organic Chemistry
- Polymers and Plastics
- Materials Chemistry
フィンガープリント Hard Carbon Films Synthesized By Atmospheric Pressure Filamentary Dielectric Barrier Discharge' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。
これを引用
Suzuki, T., & Shirakura, A. (2018). Hard Carbon Films Synthesized By Atmospheric Pressure Filamentary Dielectric Barrier Discharge. Macromolecular Symposia, 382(1), [1800084]. https://doi.org/10.1002/masy.201800084