Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies

T. Sakurai, M. Noborisaka, T. Hirako, A. Shirakura, T. Suzuki

研究成果: Article査読

12 被引用数 (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds