High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

Md D. Rahaman, K. Gomita, N. Kawaguchi, H. Kaiju, K. Kondo, A. Ishibashi

研究成果: Article査読

1 被引用数 (Scopus)

抄録

As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultra-high clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.

本文言語English
ページ(範囲)1356-1357
ページ数2
ジャーナルElectronics Letters
43
24
DOI
出版ステータスPublished - 2007 11 30
外部発表はい

ASJC Scopus subject areas

  • 電子工学および電気工学

引用スタイル