High-contrast imaging of nano-channels using reflection near-field scanning optical microscope enhanced by optical interference

Masaru Sakai, Shuji Mononobe, Shusaku Akiba, Akifumi Matsuda, Wakana Hara, Mamoru Yoshimoto, Toshiharu Saiki

研究成果: Article査読

2 被引用数 (Scopus)

抄録

We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.

本文言語English
ページ(範囲)266-268
ページ数3
ジャーナルOptical Review
13
4
DOI
出版ステータスPublished - 2006 7

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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