TY - JOUR
T1 - High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens
AU - Takeuchi, Akihisa
AU - Uesugi, Kentaro
AU - Uesugi, Masayuki
AU - Toda, Hiroyuki
AU - Hirayama, Kyosuke
AU - Shimizu, Kazuyuki
AU - Matsuo, Koichi
AU - Nakamura, Takashi
N1 - Funding Information:
We would like to thank Tomoki Fukui [Japan Synchrotron Radiation Research Institute (JASRI), SPring-8] for his technical support. We also thank Dr. Seiichi Itabashi and Dr. Akira Motoyoshi for their helpful advice regarding the design and development of A-FZPs and CZPs. This work was supported, in part, by Grants-in-Aid for Scientific Research from the Japan Society for the Promotion of Science (Grant No. 18H03748) as well as by Riken.
Funding Information:
We would like to thank Tomoki Fukui [Japan Synchrotron Radiation Research Institute (JASRI), SPring-8] for his technical support. We also thank Dr. Seiichi Itabashi and Dr. Akira Motoyoshi for their helpful advice regarding the design and development of A-FZPs and CZPs. This work was supported, in part, by Grants-in-Aid for Scientific Research from the Japan Society for the Promotion of Science (Grant No. 18H03748) as well as by Riken. We would also like to thank Editage (www.editage.com) for English language editing. The experiments at SPring-8 were performed with the approval of JASRI (Grant Nos. 2015A1402, 2015A1482, 2016B1454, 2017A1377, 2017B1482, 2018A1382, 2018A1389, 2018B1395, 2019A1169, 2019B1406, 2019B1404, and 2020A1390).
Publisher Copyright:
© 2021 Author(s).
PY - 2021/2/1
Y1 - 2021/2/1
N2 - In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm-100 nm were successfully resolved in the x-ray energy range of 15 keV-37.7 keV. The effective field of view was ∼60 μm, and the typical measurement time for one tomographic scan was 30 min-60 min. The optical system was established at the 250-m-long beamline 20XU of SPring-8 to realize greater than 100× magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed for high-energy x-ray imaging, was used as the objective lens. The design of the A-FZP for high-energy imaging is discussed, and its diffraction efficiency distribution is evaluated. The spatial resolutions of this system at energies of 15 keV, 20 keV, 30 keV, and 37.7 keV were examined using a test object, and the measured values are shown to be in good agreement with theoretical values. High-energy x-ray nano-CT in combination with x-ray micro-CT is applied for 3D multiscale imaging. The entire bodies of bulky samples, ∼1 mm in diameter, were measured with the micro-CT, and the nano-CT was used for nondestructive observation of regions of interest. Examples of multiscale CT measurements involving carbon steel, mouse bones, and a meteorite are discussed.
AB - In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm-100 nm were successfully resolved in the x-ray energy range of 15 keV-37.7 keV. The effective field of view was ∼60 μm, and the typical measurement time for one tomographic scan was 30 min-60 min. The optical system was established at the 250-m-long beamline 20XU of SPring-8 to realize greater than 100× magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed for high-energy x-ray imaging, was used as the objective lens. The design of the A-FZP for high-energy imaging is discussed, and its diffraction efficiency distribution is evaluated. The spatial resolutions of this system at energies of 15 keV, 20 keV, 30 keV, and 37.7 keV were examined using a test object, and the measured values are shown to be in good agreement with theoretical values. High-energy x-ray nano-CT in combination with x-ray micro-CT is applied for 3D multiscale imaging. The entire bodies of bulky samples, ∼1 mm in diameter, were measured with the micro-CT, and the nano-CT was used for nondestructive observation of regions of interest. Examples of multiscale CT measurements involving carbon steel, mouse bones, and a meteorite are discussed.
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U2 - 10.1063/5.0020293
DO - 10.1063/5.0020293
M3 - Article
C2 - 33648114
AN - SCOPUS:85100493753
SN - 0034-6748
VL - 92
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 2
M1 - 023701
ER -