High-order calculation by 3-point method for precise roundness measurement

Sotomitsu Hara, Toru Namerikawa, Fumio Matsumura

研究成果: Article査読

1 被引用数 (Scopus)

抄録

In the field of roundness measurements, the 3-point method is very useful. We used this method for precise column estimation in the range of 0.01 micron p-p including high-order harmonic components up to the 254th. The high-order calculation is critical for setting angles among three sensors. We determined the invalid setting angles and showed it on a chart, and we show a method for obtaining suitable accurate angles among these sensors. We are testing the relative accuracy on the testing model. Absolute accuracy has not been confirmed yet, but we consider that these results show me a reasonable roundness.

本文言語English
ページ(範囲)4596-4602
ページ数7
ジャーナルNippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
62
604
DOI
出版ステータスPublished - 1996
外部発表はい

ASJC Scopus subject areas

  • 材料力学
  • 機械工学
  • 産業および生産工学

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