High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

Nguyen Thanh-Vinh, Nguyen Binh-Khiem, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

59 被引用数 (Scopus)

抄録

In this paper, we proposed a design to increase the sensitivity of a piezoresistive-type triaxial tactile sensor. Using conventional piezoresistive tactile sensors, in which the piezoresistive elements were completely embedded inside an elastic block, our proposed tactile sensor design features an air cavity underneath the piezoresistive elements. The cavity was created by pressing an elastic cap with microstructures onto the piezoresistive cantilevers of a sensor chip. We confirmed that the proposed design increased the sensitivity of the tactile sensor by approximately 150 times and 100 times in response to normal and lateral forces, respectively.

本文言語English
ページ(範囲)167-175
ページ数9
ジャーナルSensors and Actuators, A: Physical
215
DOI
出版ステータスPublished - 2014 8 15
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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