Highly Sensitive Angular Accelerometer Utilizing Piezoresistive Cantilever and Spiral Liquid Channel

Byeongwook Jo, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a highly sensitive angular accelerometer utilizing a piezoresistive cantilever and spiral liquid channels. The spiral structure increases the total inertial force of liquid due to angular acceleration, which leads to the sensitivity enhancement. The differential pressure between two spiral liquid channels was measured by a piezoresistive cantilever with the resolution of 0.01 Pa. The developed sensor with number of turns of the spiral with 25 achieved the sensitivity enhancement by 28.5 times, compared to the ring channel sensor.

本文言語English
ホスト出版物のタイトル2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
出版社Institute of Electrical and Electronics Engineers Inc.
ページ206-209
ページ数4
ISBN(電子版)9781728116105
DOI
出版ステータスPublished - 2019 1
外部発表はい
イベント32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
継続期間: 2019 1 272019 1 31

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2019-January
ISSN(印刷版)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
国/地域Korea, Republic of
CitySeoul
Period19/1/2719/1/31

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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