Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

Celine Hadji, Ichiro Fukada, Francois Baleras, Yoshihiro Taguchi, Beatrice Icard, Vincent Agache

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 7 femtograms. The sensors performances show a one-fold improvement compared to previous alike structures - 10,000-range Q factor and ppb-range frequency stability. These devices are connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. These performances, reached in ambient conditions whether the embedded channel is filled with air or water, make the devices potentially amenable to individual particles metrology from a few 10 nm up to the μm diameter range.

本文言語English
ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1121-1124
ページ数4
ISBN(印刷版)9781479989553
DOI
出版ステータスPublished - 2015 8月 5
イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
継続期間: 2015 6月 212015 6月 25

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
国/地域United States
CityAnchorage
Period15/6/2115/6/25

ASJC Scopus subject areas

  • 器械工学
  • 電子工学および電気工学

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