Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide

Koji Tsukuma, Tomoyuki Akiyama, Hiroaki Imai

研究成果: Article

8 引用 (Scopus)

抜粋

Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.

元の言語English
ページ(範囲)869-871
ページ数3
ジャーナルJournal of the American Ceramic Society
84
発行部数4
出版物ステータスPublished - 2001 4

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ASJC Scopus subject areas

  • Ceramics and Composites

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