Identification of a paramagnetic recombination center in silicon/silicon-dioxide interface

T. Matsuoka, L. S. Vlasenko, M. P. Vlasenko, T. Sekiguchi, K. M. Itoh

研究成果: Article査読

13 被引用数 (Scopus)


A paramagnetic recombination center having an orthorhombic symmetry with g[110]= 2.0095(2), g[001]= 2.0038(2), and g [̄110]= 2.0029(2) is found at the interface between silicon and native oxide. The center is referred to P m center and observed by a spin dependent recombination based electron paramagnetic resonance detection that has the sensitivity of ∼10 11 spins/cm 2. The employment of an isotopically enriched 28Si sample with the concentration of 29Si nuclear spins reduced to 0.017% leads to narrowing of the resonance line. This narrowing is the key for the accurate determination of the angular dependence of the g-factor.

ジャーナルApplied Physics Letters
出版ステータスPublished - 2012 4 9

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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