Identification of boron clusters in silicon crystal by B1s core-level X-ray photoelectron spectroscopy: A first-principles study

Jun Yamauchi, Yoshihide Yoshimoto, Yuji Suwa

研究成果: Article査読

29 被引用数 (Scopus)

抄録

We carried out a comprehensive study on the B1s core-level X-ray photoelectron spectroscopy (XPS) binding energies for B clusters in crystalline Si using a first-principles calculation with careful evaluation of the local potential boundary condition for the model system, where convergence within 0.1 eV was confirmed for the supercell size. For ion-implanted samples, we identified experimental peaks due to B clusters and threefold B as icosahedral B12 and 〈001〉B-Si defects, respectively. For as-doped samples prepared by plasma doping, it was found that the calculated XPS binding energies for complexes of vacancies and B atoms were consistent with the experimental spectra.

本文言語English
論文番号191901
ジャーナルApplied Physics Letters
99
19
DOI
出版ステータスPublished - 2011 11 7

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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