Impact of hot wire and material gas species on the Cat-CVD coating of gas barrier SiOC thin films onto PET bottles

Masaki Nakaya, Shigeo Yasuhara, Tomoki Maeda, Atsushi Hotta

研究成果: Article査読

5 被引用数 (Scopus)

抄録

In an attempt to enhance the gas barrier property of plastic containers such as poly(ethylene terephthalate) bottles, a hot wire chemical vapor deposition (CVD) technique for a type of SiOC thin film, which has been recently found to be applicable in this field, was further studied using different hot wire and material gas species. As a result, the authors found practically useful coating was possible with specific combinations of the hot wire and material gas species.

本文言語English
ページ(範囲)21-29
ページ数9
ジャーナルSurface and Coatings Technology
344
DOI
出版ステータスPublished - 2018 6 25

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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