In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Kosuke Abe, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

研究成果: Conference contribution

抄録

This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

本文言語English
ホスト出版物のタイトル2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
出版社Institute of Electrical and Electronics Engineers Inc.
ページ680-683
ページ数4
ISBN(電子版)9781728116105
DOI
出版ステータスPublished - 2019 1
外部発表はい
イベント32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
継続期間: 2019 1 272019 1 31

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2019-January
ISSN(印刷版)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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