In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Kosuke Abe; Hidetoshi Takahashi; Tomoyuki Takahata; Isao Shimoyama

doi:10.1109/MEMSYS.2019.8870841

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Kosuke Abe, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

研究成果: Conference contribution

抄録

This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

本文言語	English
ホスト出版物のタイトル	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	680-683
ページ数	4
ISBN（電子版）	9781728116105
DOI	https://doi.org/10.1109/MEMSYS.2019.8870841
出版ステータス	Published - 2019 1月
外部発表	はい
イベント	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of 継続期間: 2019 1月 27 → 2019 1月 31

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2019-January
ISSN（印刷版）	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
国/地域	Korea, Republic of
City	Seoul
Period	19/1/27 → 19/1/31

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2019.8870841

他のファイルとリンク

引用スタイル

Abe, K., Takahashi, H., Takahata, T., & Shimoyama, I. (2019). In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 680-683). [8870841] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870841

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. / Abe, Kosuke; Takahashi, Hidetoshi; Takahata, Tomoyuki その他.

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 680-683 8870841 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

研究成果: Conference contribution

Abe, K, Takahashi, H, Takahata, T & Shimoyama, I 2019, In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870841, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 680-683, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 19/1/27. https://doi.org/10.1109/MEMSYS.2019.8870841

Abe K, Takahashi H, Takahata T, Shimoyama I. In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 680-683. 8870841. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870841

Abe, Kosuke ; Takahashi, Hidetoshi ; Takahata, Tomoyuki その他. / In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 680-683 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{f20bf2f9cb3a40398d9de023794904aa,

title = "In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping",

abstract = "This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.",

author = "Kosuke Abe and Hidetoshi Takahashi and Tomoyuki Takahata and Isao Shimoyama",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870841",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "680--683",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

}

TY - GEN

T1 - In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

AU - Abe, Kosuke

AU - Takahashi, Hidetoshi

AU - Takahata, Tomoyuki

AU - Shimoyama, Isao

PY - 2019/1

Y1 - 2019/1

N2 - This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

AB - This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

UR - http://www.scopus.com/inward/record.url?scp=85074322206&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85074322206&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870841

DO - 10.1109/MEMSYS.2019.8870841

M3 - Conference contribution

AN - SCOPUS:85074322206

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 680

EP - 683

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

文献へのアクセス

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