In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

K. Sakurai, R. Hunger, R. Scheer, C. A. Kaufmann, A. Yamada, T. Baba, Y. Kimura, K. Matsubara, P. Fons, H. Nakanishi, S. Niki

研究成果: Article査読

61 被引用数 (Scopus)

抄録

Deposition processes of Cu(In,Ga)Se2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.

本文言語English
ページ(範囲)219-234
ページ数16
ジャーナルProgress in Photovoltaics: Research and Applications
12
2-3
DOI
出版ステータスPublished - 2004
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 再生可能エネルギー、持続可能性、環境
  • 凝縮系物理学
  • 電子工学および電気工学

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