Increased O (1D) metastable density in highly Ar-diluted oxygen plasmas

Takeshi Kitajima, Toshiki Nakano, Toshiaki Makabe

研究成果: Article査読

43 被引用数 (Scopus)

抄録

Enhancement of the growth rate of Si O2 with a rare gas diluted O2 plasma is of interest for application to various microelectronics fabrications. The key is the oxygen metastable atom (D1) density, which has the potential for surface activation. We used vacuum ultraviolet optical absorption spectroscopy to detect O (D1) and found a twofold increase in the density of O (D1) due to the dilution with Ar. The density increase is reasonably explained by the increase of the electron density, the oxygen dissociation fraction, and the Ar metastable density, that are experimentally obtained for low O2 fractions.

本文言語English
論文番号091501
ジャーナルApplied Physics Letters
88
9
DOI
出版ステータスPublished - 2006 2月 27

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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