Increased O (¹D) metastable density in highly Ar-diluted oxygen plasmas

Physics & Astronomy

• absorption spectroscopy 19%
• activation 17%
• augmentation 13%
• dilution 21%
• dissociation 17%
• fabrication 12%
• metastable atoms 27%
• microelectronics 21%
• optical absorption 18%
• oxygen 12%
• oxygen atoms 22%
• oxygen plasma 100%
• rare gases 20%
• vacuum 13%