Influence of Ar Metastable on the Discharge Structure in Ar and N 2 Mixture in RF Discharges at 13.56 MHz

Fumiyoshi Tochikubo, Nobuhiko Nakano

研究成果: Article査読

48 被引用数 (Scopus)

抄録

The influence of Ar metastable atoms on the discharge structure in rf glow discharges is investigated in Ar and N2 mixed gas experimentally and theoretically. The purpose of adding a small amount of N2 is to control the metastable density. Time- and space-resolved optical emission spectroscopy is applied to investigate the behavior of high-energy electrons. The density profile of Ar metastables in Ar and N2 mixture is estimated from the optical emission intensity of the second positive band of N2, which results from the energy transfer from Ar metastables to N2 molecules. The decreases of current and optical emission intensity, as well as the Ar metastable density with increase of N2 ratio, are observed. It is concluded that ionization through metastables is one of the important processes in increasing the plasma density, especially at higher pressures.

本文言語English
ページ(範囲)4271
ページ数1
ジャーナルJapanese journal of applied physics
33
7S
DOI
出版ステータスPublished - 1994 7月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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