Influence of driving frequency on oxygen atom density in O2 radio frequency capacitively coupled plasma

Takeshi Kitajima, Kouichi Noro, Toshiki Nakano, Toshiaki Makabe

研究成果: Article査読

21 被引用数 (Scopus)

抄録

The influence of the driving frequency on the absolute oxygen atom density in an O2 radio frequency (RF) capacitively coupled plasma (CCP) was investigated using vacuum ultraviolet absorption spectroscopy with pulse modulation of the main plasma. A low-power operation of a compact inductively coupled plasma light source was enabled to avoid the significant measurement errors caused by self-absorption in the light source. The pulse modulation of the main plasma enabled accurate absorption measurement for high plasma density conditions by eliminating background signals due to light emission from the main plasma. As for the effects of the driving frequency, the effect of VHP (100 MHz) drive on oxygen atom production was small because of the modest increase in plasma density of electronegative O2 in contrast to the significant increase in electron density previously observed for electropositive Ar. The recombination coefficient of oxygen atoms on the electrode surface was obtained from a decay rate in the afterglow by comparison with a diffusion model, and it showed agreement with previously reported values for several electrode materials.

本文言語English
ページ(範囲)2670-2676
ページ数7
ジャーナルJournal of Physics D: Applied Physics
37
19
DOI
出版ステータスPublished - 2004 10月 7

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜

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