Influence of tool geometry on single-crystal CaF2 in an ultra-precision machining

Yuta Mizumoto, Hikaru Amano, Mika Fuchida, Takasumi Tanabe, Yasuhiro Kakinuma

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Optical signal processing circuits can realize ultimately efficient signal processing. Optical micro-cavities, which can localize light at certain spots, are important components for the circuits. Single-crystal calcium fluoride (CaF2) is the most suitable material for highly efficient optical micro-cavities, and ultra-precision cylindrical turning (UPCT) is a feasible fabrication process for CaF2 optical micro-cavities. However, CaF2 is characterized by brittleness and crystal anisotropy; therefore, it is necessary to prevent microcracks in UPCT because such cracks would lead to light scattering and cavity performance deterioration. In this study, we conduct plunge-cut tests on CaF2 substrate with various single point diamond tools, and experimentally investigate the influence of tool geometry and process parameters on critical depth of cut. Based on the experimental results, enhancement of CaF2 micro-cavity is attempted.

本文言語English
ホスト出版物のタイトルProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
出版社euspen
ページ117-118
ページ数2
ISBN(電子版)9780995775107
出版ステータスPublished - 2017 1 1
イベント17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 - Hannover, Germany
継続期間: 2017 5 292017 6 2

Other

Other17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
国/地域Germany
CityHannover
Period17/5/2917/6/2

ASJC Scopus subject areas

  • 材料科学(全般)
  • 機械工学
  • 器械工学
  • 産業および生産工学
  • 環境工学

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