Infrared Photodetector with Copper Resonator in Silicon Nanohole Array

Shun Yasunaga, Tetsuo Kan, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

研究成果: Conference contribution

抄録

A silicon-based infrared photodetector with metal nanostructures has been drawing attention, while lacking sufficient responsivity. We hereby present a silicon-based infrared photodetector furnished with an array of a nano-scale copper plate which induces localized surface plasmon resonance (LSPR). Each plate is placed at the bottom of a nanohole on a silicon substrate. This device possesses two features: electrically-connected copper resonators and backside-illuminating configuration. They lead to efficient photocurrent generation. As LSPR couples with vertically incident light, this structure can be a solution of realizing a silicon-based infrared photodetector that can be adapted to prevalent semiconductor devices.

本文言語English
ホスト出版物のタイトル2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版社Institute of Electrical and Electronics Engineers Inc.
ページ633-636
ページ数4
ISBN(電子版)9781728120072
DOI
出版ステータスPublished - 2019 6
外部発表はい
イベント20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
継続期間: 2019 6 232019 6 27

出版物シリーズ

名前2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国/地域Germany
CityBerlin
Period19/6/2319/6/27

ASJC Scopus subject areas

  • プロセス化学およびプロセス工学
  • 分光学
  • 電子工学および電気工学
  • 機械工学
  • 電子材料、光学材料、および磁性材料
  • 制御と最適化
  • 器械工学

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