Integrated silicon capacitive accelerometer with PLL servo technique

Engineering & Materials Science

• Phase locked loops 89%
• Accelerometers 80%
• Silicon 66%
• Networks (circuits) 46%
• Glass 33%
• Capacitance 24%
• Capacitors 22%
• Electric potential 21%
• Frequency converters 17%
• Micromachining 17%
• Electrodes 10%
• Metals 9%
• Sensors 7%
• Temperature 5%

Physics & Astronomy

• accelerometers 100%
• silicon 45%
• chips 44%
• output 25%
• capacitors 24%
• glass 24%
• electric potential 22%
• capacitance 22%
• frequency converters 16%
• micromachining 15%
• electrodes 8%
• sensors 8%
• sensitivity 8%
• symmetry 8%
• metals 7%
• temperature 4%

Chemical Compounds

• Voltage 61%
• Capacitor 57%
• Micromachining 38%
• Glass 19%
• Behavior as Electrode 14%
• Metal 12%