Interaction between free-surface oscillation and bubble translation in a megasonic cleaning bath

Yu Katano, Keita Ando

研究成果: Conference contribution

抄録

Visualization experiments were performed to study the relation between free-surface motion and bubble translation in a 1-MHz ultrasonic cleaning bath. From the visualization with a video camera, the characteristic frequencies of the free-surface oscillation (under the acoustic radiation force) and the translational velocity of cavitation bubbles (trapped via the primary Bjerknes force) were extracted, showing that there is a strong correlation between the free-surface oscillation and bubble translation. From the context of megasonic cleaning, such free-surface oscillation is expected to contribute to uniform cleaning performance with cavitation bubbles.

本文言語English
ホスト出版物のタイトルUltra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
編集者Paul W. Mertens, Kurt Wostyn, Marc Meuris, Marc Heyns
出版社Trans Tech Publications Ltd
ページ202-206
ページ数5
ISBN(印刷版)9783035738018
DOI
出版ステータスPublished - 2021
イベント15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021 - Mechelen, Belgium
継続期間: 2021 4 122021 4 15

出版物シリーズ

名前Solid State Phenomena
314 SSP
ISSN(印刷版)1012-0394
ISSN(電子版)1662-9779

Conference

Conference15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
国/地域Belgium
CityMechelen
Period21/4/1221/4/15

ASJC Scopus subject areas

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 凝縮系物理学

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