Interfacial reactions and microstructure of BaTiO 3 films prepared using fluoride precursor method

Shinobu Fujihara, Theodor Schneller, Rainer Waser

研究成果: Article査読

7 被引用数 (Scopus)


Interfacial reactions of BaF 2 and TiO 2 were investigated in preparing BaTiO 3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF 3 COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO 3 phase was obtained although a small portion of BaF 2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO 3 , BaF 2 , and amorphous TiO 2 . Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.

ジャーナルApplied Surface Science
出版ステータスPublished - 2004 1 15

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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