Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy

F. Tochikubo, T. Kokubo, S. Kakuta, A. Suzuki, T. Makabe

研究成果: Article査読

56 被引用数 (Scopus)

抄録

The radio frequency glow discharge in Ar at 13.56 MHz has been investigated by using time- and space-resolved emission spectroscopy with a resolution of 0.2 ns. The relative net excitation rate is also obtained by deconvoluting the emission profile considering the effect of the lifetime. From these results, the authors are able to guess the electron transport and the temporal structure of the discharge. ArI(3p5to 1s4), ArI(2p2to 1s5) and ArII(4p4D7/2to 4s4P5/2) lines are selected for observation. The electrons with low energy, epsilon >14.57 eV, are transported corresponding to the phase of the current. The electrons with higher energy, M>35.05 eV, are observed at the phase corresponding to the applied voltage only when the aluminium electrode is used under the present experimental conditions. It is confirmed that the high-energy electrons are secondary electrons emitted from the electrode. The RF discharge in Ar at 13.56 MHz has two modes with a hysteresis loop as the function of input energy.

本文言語English
ページ(範囲)1184-1192
ページ数9
ジャーナルJournal of Physics D: Applied Physics
23
9
DOI
出版ステータスPublished - 1990 9 14

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜

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