Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy

Engineering & Materials Science

• Optical emission spectroscopy 100%
• Glow discharges 88%
• Electrons 60%
• Emission spectroscopy 25%
• Electron Transport 23%
• Electrodes 22%
• Hysteresis loops 18%
• Aluminum 11%
• Electric potential 7%

Physics & Astronomy

• optical emission spectroscopy 68%
• glow discharges 59%
• electrons 25%
• electrodes 18%
• high energy electrons 14%
• energy 13%
• radio frequencies 12%
• hysteresis 11%
• aluminum 10%
• life (durability) 10%
• profiles 8%
• electric potential 8%
• spectroscopy 7%
• excitation 7%

Chemical Compounds

• Optical Emission Spectroscopy 75%
• Glow Discharge 71%
• Electron Particle 32%
• Energy 21%
• Emission Spectroscopy 17%
• Behavior as Electrode 15%
• Hysteresis 14%
• Electron Transport 14%
• Voltage 10%