Isotopically engineered silicon nanoelectronics

研究成果: Conference article

抜粋

Isotope engineering of silicon has been employed towards development of silicon-based quantum computers and complete modeling of nano-CMOS fabrication processes towards development of next-generation technology computer aided design (TCAD) systems.

元の言語English
記事番号4418931
ページ(範囲)303-306
ページ数4
ジャーナルTechnical Digest - International Electron Devices Meeting, IEDM
DOI
出版物ステータスPublished - 2007 12 1
イベント2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States
継続期間: 2007 12 102007 12 12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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