Laser-induced periodic structure formation in AlN ceramic

N. N. Nedyalkov, A. Dikovska, R. Nikov, G. Atanasova, S. Hayashi, M. Terakawa

研究成果: Article査読

5 被引用数 (Scopus)

抄録

In this work, we show that nanosecond laser processing of aluminium nitride (AlN) ceramic by a Nd:YAG laser operated at the fundamental wavelength (1064 nm) leads to the formation of a conductive layer decorated by a ripples structure. The characteristic orientation of these structures is perpendicular to the incident laser polarization. The period of the ripples is lower than the laser wavelength, namely, about 830 nm. Such structuring is observed after processing both in air and in vacuum. We discuss the mechanism of periodic structures formation based on the dependence of the surface morphology on the laser pulse number and fluence applied and the results of a simulation using the finite-difference time-domain approach. These results can form the basis of fabricating aluminium micro- and nanostructures with potential applications in electronics and photonics as systems for UV plasmonics.

本文言語English
論文番号107402
ジャーナルOptics and Laser Technology
144
DOI
出版ステータスPublished - 2021 12月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 電子工学および電気工学

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