Linearity and heat resisting improvement low-voltage fluid-based inclination sensor by using silica coating process

Asrulnizam Bin Abd Manaf, Othman Sidek, Yoshinori Matsumoto

研究成果: Conference contribution

抄録

In this paper, we proposed a sealing technique for a sealing glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in heat-resisting and durability characteristic. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable measuring inclination at supply voltage 1.5 V. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The linearity of characteristic can be improved when the supply voltage was set at 1.5 V. The sensitivity , response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8 deg, respectively at the supply voltage 1.5 V. The temperature characteristic was evaluated between -10 °C to 50°C.

本文言語English
ホスト出版物のタイトルIEEE Sensors 2009 Conference - SENSORS 2009
ページ168-172
ページ数5
DOI
出版ステータスPublished - 2009 12 1
イベントIEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand
継続期間: 2009 10 252009 10 28

出版物シリーズ

名前Proceedings of IEEE Sensors

Other

OtherIEEE Sensors 2009 Conference - SENSORS 2009
CountryNew Zealand
CityChristchurch
Period09/10/2509/10/28

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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