Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

抄録

We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 105 V/m (330V between the electrodes) and the air pressure of 2.0 kPa.

本文言語English
ホスト出版物のタイトルMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ913-916
ページ数4
ISBN(印刷版)9781479935086
DOI
出版ステータスPublished - 2014 1 1
外部発表はい
イベント27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
継続期間: 2014 1 262014 1 30

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域United States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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