Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, T. Takahashi, R. Shimizu, H. Ishikuro, T. Kuroda, T. Yanagida, K. Uchida

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

本文言語English
ホスト出版物のタイトル2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページT158-T159
ISBN(電子版)9784863487178
DOI
出版ステータスPublished - 2019 6月
イベント39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan
継続期間: 2019 6月 92019 6月 14

出版物シリーズ

名前Digest of Technical Papers - Symposium on VLSI Technology
2019-June
ISSN(印刷版)0743-1562

Conference

Conference39th Symposium on VLSI Technology, VLSI Technology 2019
国/地域Japan
CityKyoto
Period19/6/919/6/14

ASJC Scopus subject areas

  • 電子工学および電気工学

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