Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

Masayuki Katagiri, Naoshi Sakuma, Yuichi Yamazaki, Mariko Suzuki, Shintaro Sato, Mizuhisa Nihei, Tadashi Sakai, Yuji Awano

研究成果: Article査読

5 被引用数 (Scopus)

抄録

Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 °C under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 °C is observed.

本文言語English
ページ(範囲)902051-902053
ページ数3
ジャーナルJapanese journal of applied physics
48
9 Part 1
DOI
出版ステータスPublished - 2009 12 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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