Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma, Toshimi Fukui, Motoyuki Toki, Hiroaki Imai

研究成果: Article査読

29 被引用数 (Scopus)

抄録

The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

本文言語English
ページ(範囲)91-95
ページ数5
ジャーナルJournal of Sol-Gel Science and Technology
27
1
DOI
出版ステータスPublished - 2003 5月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • セラミックおよび複合材料
  • 化学 (全般)
  • 生体材料
  • 凝縮系物理学
  • 材料化学

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