Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma; Toshimi Fukui; Motoyuki Toki; Hiroaki Imai

doi:10.1023/A:1022640228969

Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma, Toshimi Fukui, Motoyuki Toki, Hiroaki Imai

応用化学科

研究成果: Article › 査読

27 被引用数 (Scopus)

抄録

The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm₂) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

本文言語	English
ページ（範囲）	91-95
ページ数	5
ジャーナル	Journal of Sol-Gel Science and Technology
巻	27
号	1
DOI	https://doi.org/10.1023/A:1022640228969
出版ステータス	Published - 2003 5月

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
セラミックおよび複合材料
化学 (全般)
生体材料
凝縮系物理学
材料化学

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10.1023/A:1022640228969

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abstract = "The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.",

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AU - Toki, Motoyuki

AU - Imai, Hiroaki

PY - 2003/5

Y1 - 2003/5

N2 - The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

AB - The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

KW - ITO

KW - Organic polymer

KW - Sol-gel

KW - Ultraviolet laser

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Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

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ASJC Scopus subject areas

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