The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.
|ジャーナル||Journal of Sol-Gel Science and Technology|
|出版ステータス||Published - 2003 5月|
ASJC Scopus subject areas
- 化学 (全般)