Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

研究成果: Review article査読

本文言語English
ページ(範囲)971-974
ページ数4
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
84
12
DOI
出版ステータスPublished - 2018 1 1

ASJC Scopus subject areas

  • Mechanical Engineering

引用スタイル