Measurement and compensation of tool contour error using white light interferometry for ultra-precision diamond turning of freeform surfaces

Kodai Nagayama, Jiwang Yan

研究成果: Article査読

3 被引用数 (Scopus)

抄録

In ultra-precision diamond turning of freeform optics, it is necessary to obtain submicron-level form accuracy with high efficiency. In this study, we proposed a new method for the quick measurement and compensation of tool contour errors to improve the form accuracy of the workpiece. In this method, the nanometer-scale contour error of a diamond tool is quickly and precisely measured using a white light interferometer and then compensated for, before machining. Results showed that the contour of a diamond tool was measured with an error less than 0.05 μm peak-to-valley (P-V) and the feasibility of error compensation was verified through cutting experiments to create a paraboloid mirror and a microlens array. The form error decreased to 0.2 μm P-V regardless of the contour error of the diamond tools when cutting the paraboloid mirror, and that of the microlens array was reduced to 0.15 μm P-V during a single machining step.

本文言語English
ページ(範囲)654-664
ページ数11
ジャーナルInternational Journal of Automation Technology
14
4
DOI
出版ステータスPublished - 2020

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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