Measurement of the Thermal Diffusivity of Thin Film on Substrate by the Photoacoustic Method: (1st Report, Examination of the Method and Measurement of Metal Thin Foils)

Masanori Akabori, Shunsuke Miyagi, Yuji Nagasaka, Akira Nagashima

研究成果: Article査読

抄録

This paper reports the measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method. In order to examine the method, we built a new apparatus and proposed (1) a system calibration procedure using thermally thick materials and (2) a data analysis procedure based on the Rosencwaig and Gersho theory (RG theory). As a result of using a transparent photoacoustic cell, the systematic error factors which were caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium and stainless steel (SUS304) thin foils (thickness: 50–100 µm) with three different substrate materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of the film thickness and substrate material.

本文言語English
ページ(範囲)3184-3190
ページ数7
ジャーナルTransactions of the Japan Society of Mechanical Engineers Series B
57
541
DOI
出版ステータスPublished - 1991
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 機械工学

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