Measurement of vacuum pressure with cantilever-based differential pressure sensor utilizing vapor pressure and narrow gap of cantilever

N. Namioka, Y. Takei, N. Minh-Dung, T. Usami, N. Thanh-Vinh, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a measurement method of vacuum pressure from 10-1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the chamber to be stable at the vapor pressure of the liquid even when the exterior was vacuumed. The exterior vacuum pressure was calculated from the cantilever output since the vapor pressure of the chamber is known. We showed that the lower limit of measurable range was expanded into 0.1 Pa owing to noise reduction. The proposed method is promising to realize wide-range vacuum pressure measurement.

本文言語English
ホスト出版物のタイトルMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ836-838
ページ数3
ISBN(電子版)9781509019731
DOI
出版ステータスPublished - 2016 2 26
外部発表はい
イベント29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
継続期間: 2016 1 242016 1 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2016-February
ISSN(印刷版)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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