Mechanical properties of Al-3%Ti thin film for reliability analysis of RF MEMS switch

Jun Hyub Park, Yun Jae Kim, Sung Hoon Choa

研究成果: Article査読

6 被引用数 (Scopus)


This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1 μn and 480μm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

ジャーナルKey Engineering Materials
306-308 II
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学


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