Mechanical properties of few layer graphene cantilever

Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

9 引用 (Scopus)

抜粋

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

元の言語English
ホスト出版物のタイトルMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版者Institute of Electrical and Electronics Engineers Inc.
ページ1087-1090
ページ数4
ISBN(印刷物)9781479935086
DOI
出版物ステータスPublished - 2014 1 1
外部発表Yes
イベント27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
継続期間: 2014 1 262014 1 30

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷物)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
United States
San Francisco, CA
期間14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント Mechanical properties of few layer graphene cantilever' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Matsui, K., Inaba, A., Oshidari, Y., Takei, Y., Takahashi, H., Takahata, T., Kometani, R., Matsumoto, K., & Shimoyama, I. (2014). Mechanical properties of few layer graphene cantilever. : MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1087-1090). [6765834] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765834