MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

S. Kohyama, H. Takahashi, S. Yoshida, H. Onoe, K. H. Shoji, T. Tsukagoshi, T. Takahata, I. Shimoyama

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

本文言語English
ホスト出版物のタイトル2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1040-1043
ページ数4
ISBN(電子版)9781509050789
DOI
出版ステータスPublished - 2017 2 23
イベント30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
継続期間: 2017 1 222017 1 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
国/地域United States
CityLas Vegas
Period17/1/2217/1/26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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