MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

S. Kohyama, Hidetoshi Takahashi, S. Yoshida, Hiroaki Onoe, K. H. Shoji, T. Tsukagoshi, T. Takahata, I. Shimoyama

研究成果: Conference contribution

3 引用 (Scopus)

抄録

This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

元の言語English
ホスト出版物のタイトル2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版者Institute of Electrical and Electronics Engineers Inc.
ページ1040-1043
ページ数4
ISBN(電子版)9781509050789
DOI
出版物ステータスPublished - 2017 2 23
イベント30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
継続期間: 2017 1 222017 1 26

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
United States
Las Vegas
期間17/1/2217/1/26

Fingerprint

Hydrogel
microparticles
Hydrogels
microelectromechanical systems
MEMS
sensors
Sensors
pushing
Microscopes
chips
microscopes
output
Experiments

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Kohyama, S., Takahashi, H., Yoshida, S., Onoe, H., Shoji, K. H., Tsukagoshi, T., ... Shimoyama, I. (2017). MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1040-1043). [7863590] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863590

MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. / Kohyama, S.; Takahashi, Hidetoshi; Yoshida, S.; Onoe, Hiroaki; Shoji, K. H.; Tsukagoshi, T.; Takahata, T.; Shimoyama, I.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1040-1043 7863590.

研究成果: Conference contribution

Kohyama, S, Takahashi, H, Yoshida, S, Onoe, H, Shoji, KH, Tsukagoshi, T, Takahata, T & Shimoyama, I 2017, MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863590, Institute of Electrical and Electronics Engineers Inc., pp. 1040-1043, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863590
Kohyama S, Takahashi H, Yoshida S, Onoe H, Shoji KH, Tsukagoshi T その他. MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1040-1043. 7863590 https://doi.org/10.1109/MEMSYS.2017.7863590
Kohyama, S. ; Takahashi, Hidetoshi ; Yoshida, S. ; Onoe, Hiroaki ; Shoji, K. H. ; Tsukagoshi, T. ; Takahata, T. ; Shimoyama, I. / MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1040-1043
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