MEMS tactile display: From fabrication to characterization

Norihisa Miki, Yumi Kosemura, Junpei Watanabe, Hiroaki Ishikawa

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce “rough†and “smooth†surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.

本文言語English
ホスト出版物のタイトルReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
出版社SPIE
ISBN(印刷版)9780819498885
DOI
出版ステータスPublished - 2014 1 1
イベントReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII - San Francisco, CA, United States
継続期間: 2014 2 32014 2 4

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8975
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

Other

OtherReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
国/地域United States
CitySan Francisco, CA
Period14/2/314/2/4

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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