Mems tactile display with hydraulic displacement amplification mechanism

T. Ninomiya, K. Osawa, Y. Okayama, Y. Matsumoto, N. Miki

研究成果: Conference article査読

18 被引用数 (Scopus)

抄録

Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

本文言語English
論文番号4805420
ページ(範囲)467-470
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI
出版ステータスPublished - 2009
イベント22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
継続期間: 2009 1 252009 1 29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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