Metastable Ti1-xAlxN films with different Al content

A. Kimura, H. Hasegawa, K. Yamada, T. Suzuki

研究成果: Article査読

35 被引用数 (Scopus)

抄録

The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.

本文言語English
ページ(範囲)601-602
ページ数2
ジャーナルJournal of Materials Science Letters
19
7
DOI
出版ステータスPublished - 2000 1 1

ASJC Scopus subject areas

  • Materials Science(all)

フィンガープリント 「Metastable Ti<sub>1-x</sub>Al<sub>x</sub>N films with different Al content」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル