Micro-character printing on a diamond plate by femtosecond infrared optical pulses

Masaki Takesada; Egidijus Vanagas; Dmitri Tuzhilin; Igor Kudryashov; Shoji Suruga; Hidetoshi Murakami; Nobuhiko Sarukura; Kazunari Matsuda; Shuji Mononobe; Toshiharu Saiki; Mamoru Yoshimoto; Shin Ya Koshihara

doi:10.1143/jjap.42.4613

Micro-character printing on a diamond plate by femtosecond infrared optical pulses

Masaki Takesada, Egidijus Vanagas, Dmitri Tuzhilin, Igor Kudryashov, Shoji Suruga, Hidetoshi Murakami, Nobuhiko Sarukura, Kazunari Matsuda, Shuji Mononobe, Toshiharu Saiki, Mamoru Yoshimoto, Shin Ya Koshihara

研究成果: Article › 査読

12 被引用数 (Scopus)

抄録

Processing of less than 400 nm has been performed on the surface of a diamond plate by means of a femtosecond infrared pulse laser. Various-characters with a size of about 1 nm were drawn by the femtosecond pulse laser system in conjunction with a microscope equipped with a precisely controlled piezo-stage. The tightly focused laser light on the flat surface of the diamond made it possible to minimize the light-induced graphitization. The surface of the diamond plate after laser machining was analyzed by micro-Raman measurements to estimate the graphitization effect induced by laser irradiation. The obtained results indicate that graphitization increased with the number of irradiated laser pulses.

本文言語	English
ページ（範囲）	4613-4616
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	42
号	7 A
DOI	https://doi.org/10.1143/jjap.42.4613
出版ステータス	Published - 2003 7
外部発表	はい

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/jjap.42.4613

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引用スタイル

Takesada, M., Vanagas, E., Tuzhilin, D., Kudryashov, I., Suruga, S., Murakami, H., Sarukura, N., Matsuda, K., Mononobe, S., Saiki, T., Yoshimoto, M., & Koshihara, S. Y. (2003). Micro-character printing on a diamond plate by femtosecond infrared optical pulses. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 42(7 A), 4613-4616. https://doi.org/10.1143/jjap.42.4613

Micro-character printing on a diamond plate by femtosecond infrared optical pulses. / Takesada, Masaki; Vanagas, Egidijus; Tuzhilin, Dmitri; Kudryashov, Igor; Suruga, Shoji; Murakami, Hidetoshi; Sarukura, Nobuhiko; Matsuda, Kazunari; Mononobe, Shuji; Saiki, Toshiharu; Yoshimoto, Mamoru; Koshihara, Shin Ya.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 7 A, 07.2003, p. 4613-4616.

研究成果: Article › 査読

Takesada, M, Vanagas, E, Tuzhilin, D, Kudryashov, I, Suruga, S, Murakami, H, Sarukura, N, Matsuda, K, Mononobe, S, Saiki, T, Yoshimoto, M & Koshihara, SY 2003, 'Micro-character printing on a diamond plate by femtosecond infrared optical pulses', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 42, no. 7 A, pp. 4613-4616. https://doi.org/10.1143/jjap.42.4613

Takesada, Masaki ; Vanagas, Egidijus ; Tuzhilin, Dmitri ; Kudryashov, Igor ; Suruga, Shoji ; Murakami, Hidetoshi ; Sarukura, Nobuhiko ; Matsuda, Kazunari ; Mononobe, Shuji ; Saiki, Toshiharu ; Yoshimoto, Mamoru ; Koshihara, Shin Ya. / Micro-character printing on a diamond plate by femtosecond infrared optical pulses. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2003 ; Vol. 42, No. 7 A. pp. 4613-4616.

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title = "Micro-character printing on a diamond plate by femtosecond infrared optical pulses",

abstract = "Processing of less than 400 nm has been performed on the surface of a diamond plate by means of a femtosecond infrared pulse laser. Various-characters with a size of about 1 nm were drawn by the femtosecond pulse laser system in conjunction with a microscope equipped with a precisely controlled piezo-stage. The tightly focused laser light on the flat surface of the diamond made it possible to minimize the light-induced graphitization. The surface of the diamond plate after laser machining was analyzed by micro-Raman measurements to estimate the graphitization effect induced by laser irradiation. The obtained results indicate that graphitization increased with the number of irradiated laser pulses.",

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AU - Suruga, Shoji

AU - Murakami, Hidetoshi

AU - Sarukura, Nobuhiko

AU - Matsuda, Kazunari

AU - Mononobe, Shuji

AU - Saiki, Toshiharu

AU - Yoshimoto, Mamoru

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AB - Processing of less than 400 nm has been performed on the surface of a diamond plate by means of a femtosecond infrared pulse laser. Various-characters with a size of about 1 nm were drawn by the femtosecond pulse laser system in conjunction with a microscope equipped with a precisely controlled piezo-stage. The tightly focused laser light on the flat surface of the diamond made it possible to minimize the light-induced graphitization. The surface of the diamond plate after laser machining was analyzed by micro-Raman measurements to estimate the graphitization effect induced by laser irradiation. The obtained results indicate that graphitization increased with the number of irradiated laser pulses.

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KW - Graphitization

KW - Laser processing

KW - Micro-character printing

KW - Micromachining

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Micro-character printing on a diamond plate by femtosecond infrared optical pulses

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