Micro grooving on single-crystal germanium for infrared Fresnel lenses

Jiwang Yan, Kouki Maekawa, Jun'ichi Tamaki, Tsunemoto Kuriyagawa

研究成果: Article査読

88 被引用数 (Scopus)

抄録

Single-crystal germanium is an excellent optical material in the infrared wavelength range. The development of germanium Fresnel lenses not only improves the optical imaging quality but also enables the miniaturization of optical systems. In the present work, we developed a ductile-mode micro grooving process for fabricating Fresnel lenses on germanium. We used a sharply pointed diamond tool to generate the micro Fresnel structures under three-axis ultraprecision numerical control. By adopting a small angle between the cutting edge and the tangent of the objective surface, this method enables the uniform thinning of the undeformed chip thickness to the nanometric range, and thus provides complete ductile regime machining of brittle materials. Under the present conditions, a Fresnel lens which has a form error of 0.5 νm and surface roughness of 20-50 nm Ry (peak-to-valley) was fabricated successfully during a single tool pass.

本文言語English
ページ(範囲)1925-1931
ページ数7
ジャーナルJournal of Micromechanics and Microengineering
15
10
DOI
出版ステータスPublished - 2005 10 1
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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